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Laser Resistor Trimming FAQs
1. What's involved in doing thin- or
thick-film trimming?
Mainly spot size and laser power. <25 micron spot
size for thin- and >50
microns for thick-film. >1w laser power for
thick- and <1w for thin-film.
2. Can you do thin- and thick-film
trimming?
Yes.
3. Can you do passive or active
trimming?
Yes. Active trimming is usually to a
circuit voltage output.
Passive trimming is to a resistance value. We use a HP
DVM, 0.0015% for dc voltage, 0.05% for ac
voltage. 6.5 digits. Computer interfaced to the
laser.
4. How do laser trimmers operate?
They are ablative and therefore increase resistance value.
Decreasing the resistance involves laser thermal annealing which can happen
if the laser goes cw (loss of Q-switched pulses).
Annealed resistors generally are unstable.
5. What is your expected yield after
trimming?
Close to 100%. A typical problem is resistive
material that is screened on too small, making the initial resistance
higher than the target resistance. So the resistor can
not be trimmed.
6. What is your accuracy of laser
placement?
This is an absolute spec for comparison to a standard.
It is usually given as +/- 0.1 mil per inch of travel.
However, thick-film resistors are not screened with
"perfect" accuracy. So laser accuracy is not
the issue, resistor accuracy is.
10. What type laser do you use?
Q-switched Nd:YAG (lamp pumped) or Vanadate (diode laser
pumped).
11. How do initial & final values
affect trimming?
The further apart the initial & final values, the
longer to trim. This will vary considerably due to process variables.
12. Do you
have fixed probe cards
with up/down probe motion?
No. We use flying probes.
13. Tell me about your flying probes.
Our flying probes allow for flexibility of setup.
Our laser trimmers can be supplied with an overhead moving
beam for trim motion and can have a lower X/Y stage for moving
the substrate.
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