Laserod
Machined MEMS Device Goes to Mars
July 5, 2005 --
A JPL silicon device intended for future Mars
Rovers is being processed by Laserod. It is a
MEMS (Micro Electronic Mechanical Systems) miniature
gyroscope. The application involves laser drilling
a 10 micron diameter hole to vent accumulated
gases from the device. Since the gyroscope has
moving parts, the presence of any gases can dampen
its motion. The gases accumulate either during
the sealing of the MEMS device in the commercial
vacuum packaging or through outgasing, in which
the materials inside the surface of the cavity
emit gases.
The gyroscope is currently being built and tested
by the JPL/Boeing Miniature Gyroscope Project
Team at JPL. It incorporates innovative technology.
The design allows for a smaller, lighter and more
precise navigational system that operates on less
power, yet is more durable. Gyroscopes are an
integral part of any spacecrafts control system
and determine its altitude and rotation rates.
The gyroscope must be of extreme sensitivity and
resist harsh environments while still allowing
for repeated use. Actually, a large portion of
a mission’s integral instruments rely upon
the precision and durability of the gyroscope
to compensate for any imprecision in their own
systems.
10 micron diameter hole to vent accumulated
gases from the device.
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The team at JPL is working on two different designs
for these MEMS gyroscopes. The Post Resonator
Gyroscope (PRG) is a little more advanced in technological
applicability to space missions; it uses the entire
silicon wafer and contains a post mounted on a
layer containing the in-plane resonator. The second
design, the Disk Resonated Gyroscope (DRG), is
in the maturing stages of development but is 1in^3
what’s this? in size, with low production
costs and compatible with wafer scale fabrication.
Both designs are low power and display high performance
in resonator stability and sensitivity. The DRG
is predicted to be of higher performance and requires
the laser drilled vent hole which Laserod is providing.
Learn More about miniature gyros and other MEMS
based devices used for space missions.
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TO THE CUTTING EDGE
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