Laserod Machined MEMS Device Goes to Mars
Laserod Machined MEMS Device Goes to Mars
A JPL silicon device intended for future Mars Rovers was processed by Laserod. It is a MEMS (Micro Electronic Mechanical Systems) miniature gyroscope. The application involves laser drilling a 10 micron diameter hole to vent accumulated gases from the device. Since the gyroscope has moving parts, the presence of any gases can dampen its motion. The gases accumulate either during the sealing of the MEMS device in the commercial vacuum packaging or through outgasing, in which the materials inside the surface of the cavity emit gases.
The gyroscope is currently being built and tested by the JPL/Boeing Miniature Gyroscope Project Team at JPL. It incorporates innovative technology. The design allows for a smaller, lighter and more precise navigational system that operates on less power, yet is more durable. Gyroscopes are an integral part of any spacecrafts control system and determine its altitude and rotation rates. The gyroscope must be of extreme sensitivity and resist harsh environments while still allowing for repeated use. Actually, a large portion of a missions integral instruments rely upon the precision and durability of the gyroscope to compensate for any imprecision in their own systems.
10 micron diameter hole in silicon MEMS to vent accumulated gases from the device.
The team at JPL is working on two different designs for these MEMS gyroscopes. The Post Resonator Gyroscope (PRG) is a little more advanced in technological applicability to space missions; it uses the entire silicon wafer and contains a post mounted on a layer containing the in-plane resonator. The second design, the Disk Resonated Gyroscope (DRG), is in the maturing stages of development but is 1in^3 whats this? in size, with low production costs and compatible with wafer scale fabrication. Both designs are low power and display high performance in resonator stability and sensitivity. The DRG is predicted to be of higher performance and requires the laser drilled vent hole which Laserod is providing.
Learn More about miniature gyros and other MEMS based devices used for space missions.
