Precision Laser Machining of Ceramic
Substrates used in Microelectronic Devices
Using Nd:YAG Solid-State Lasers
Laserod laser machines ceramic
substrates. Tolerances to a few microns can be attained. But
the most remarkable thing about our laser is its narrow
kerf of 1 mil (25 microns) or 10 microns on special
order.. Another useful capability we have is laser
"zapping" through a metal layer on top of the
ceramic. A metalized surface, gold for example, is
easily scribed over. The gold coating actually
assists laser removal.
Laserod cuts, slots and drills ceramic,
as shown below.
To learn more about how solid-state
Nd:YAG laser machining compares to CO2 gas lasers,
visit and/or go to FAQ
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Ceramic Contour Cutting by
Nd:YAG Laser
Fig. 1. For a medical
application. 25 mil thick Alumina. Laser can cut
any shape.
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Slots Micromachined in Alumina
Ceramic by Nd:YAG Laser
Fig. 2. 6.5 x 40 mil
slots in 10 mil thickness.
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A Sensor Machined by Nd:YAG
Laser
Fig. 3. Thickness of this
JPL sensor ceramic is .025" (625
microns). A part was extracted for a Mars
Spaceship.
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