
Precision Laser Machining of Ceramic Substrates used in
Microelectronic Devices
by Nd:YAG Solid-State Lasers
Laserod laser machines ceramic substrates. Tolerances to a few microns can be attained. But the most remarkable thing about our laser is its narrow kerf
of 1 mil (25 microns) or 10 microns on special order.. Another useful capability we have is laser "zapping"
through a metal layer on top of the ceramic. A metalized surface, gold for
example, is easily scribed over. The gold coating actually assists laser
removal.
Laserod cuts, slots and drills ceramic, as shown below.
To learn more about how solid-state Nd:YAG laser machining compares to CO2
gas lasers, visit and/or go to FAQ
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Ceramic Contour Cutting by Nd:YAG Laser
Fig. 1. For a medical application.
25 mil thick Alumina. Laser can cut any shape.
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Slots Micromachined in Alumina Ceramic by Nd:YAG Laser
Fig. 2. 6.5 x 40 mil slots in 10
mil thickness.
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A Sensor Machined by Nd:YAG Laser
Fig. 3. Thickness of this JPL
sensor
ceramic is .025" (625 microns). A part was extracted for a Mars Spaceship.
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